Publication | Closed Access
Characterization of piezoelectric PZT beam actuators for driving 2D scanning micromirrors
73
Citations
43
References
2010
Year
EngineeringScanning MicromirrorsMicrofabricationPiezoelectric NanogeneratorsMechanical EngineeringPiezoelectric MaterialsPiezoelectricityPiezoelectric MaterialInstrumentationMicroelectronicsMicro-electromechanical SystemMicromachined Ultrasonic Transducer
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