EngineeringMechanical EngineeringMechatronics EngineeringMechatronicsMicroelectromechanical SystemsVibrationAdaptive ControlAttitude ControlControl SystemsDynamic ControlFeedback ControlVibration ControlAutomatic Gain ControlGain ControlGyroscopesLyapunov ControlLyapunov FunctionsLyapunov StabilityResponse TimeVibration Control Systems
We present an adaptive controller to control all modes of a vibrational MEMS gyroscope. Our controller tunes the natural frequency of the drive axis, regulates the amplitude of the drive axis vibration, cancels out quadrature error due to stiffness coupling, and drives the sense axis vibration to zero in force-to-rebalance mode. We use both feedforward and feedback control. We simulate this controller for the Berkeley Z-axis gyro. The Lyapunov function used has a critical effect on the system response time, especially for the force-to-rebalance and automatic gain control loops.
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Micromachined inertial sensors
N. Yazdi, Farrokh Ayazi, K. Najafi · Proceedings of the IEEE · 1998 · 1.8K citations
Engineering, Electrical Engineering, Mechanical Engineering +17
Dynamics and control of micromachined gyroscopes
Andrei M. Shkel, Roberto Horowitz, Ashwin A. Seshia et al. · 1999 · 139 citations
Engineering, Mechanical Engineering, Mechatronics Engineering +17
Adaptive control for z-axis MEMS gyroscopes
Sungsu Park, Roberto Horowitz · 2001 · 46 citations
Engineering, Mechanical Engineering, Mechatronics Engineering +17