Towards micro-assembly of hybrid MOEMS components on a reconfigurable silicon free-space micro-optical bench - Concepedia

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Towards micro-assembly of hybrid MOEMS components on a reconfigurable silicon free-space micro-optical bench

DOI Full Paper Access

54

Citations

27

References

2010

Year

Sylwester Bargiel, Kanty Rabenorosoa, Cédric Clévy, Christophe Gorecki, Philippe Lutz

Journal of Micromechanics and Microengineering

Abstract

International audience

References

	Year	Citations

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