Concepedia

Publication | Closed Access

A SrRuO3/IrO2 top electrode FeRAM with Cu BEOL process for embedded memory of 130nm generation and beyond

DOI

21

Citations

5

References

2006

Year

Y. Kumura, T. Ozaki, Haruichi Kanaya, O. Hidaka, Y. Shimojo, S. Shuto, Yuji Yamada, K. Tomioka, K. Yamakawa, S. Yamazaki,
Solid-State Electronics

References

YearCitations

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