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Publication | Open Access

The effect of argon plasma treatment on the permeation barrier properties of silicon nitride layers

DOIFull Paper Access

33

Citations

24

References

2013

Year

Subimal Majee, M.F. Cerqueira, Denis Tondelier, Bernard Geffroy, Yvan Bonnassieux, Pedro Alpuim, J.E. Bourée
Surface and Coatings Technology

References

YearCitations

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