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Uncooled infrared thermo-mechanical detector array: Design, fabrication and testing

M. Fatih Toy, Onur Ferhanoğlu, Hamdi Torun, Hakan Ürey

Sensors and Actuators A Physical · 2009 · 33 citations · 14 references

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14

<i>Optical Properties of Thin Solid Films</i>

O.S. Heavens, Stefan Singer · Physics Today · 1956 · 1.4K citations

, , +12

Optical properties of thin solid films

K.H. Jolliffee · Vacuum · 1954 · 1.1K citations

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Optomechanical uncooled infrared imaging system: design, microfabrication, and performance

M. Y. Mao, Roberto Horowitz, Arun Majumdar et al. · Journal of Microelectromechanical Systems · 2002 · 215 citations

, , +17

Performance of uncooled microcantilever thermal detectors

Panos G. Datskos, Nickolay V. Lavrik, Slobodan Rajic · Review of Scientific Instruments · 2004 · 158 citations

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A new atomic force microscope probe with force sensing integrated readout and active tip

A. Guclu Onaran, M. Balantekin, W. Lee et al. · Review of Scientific Instruments · 2006 · 90 citations

, , +14