Publication | Closed Access
Kinetics of silicon film growth and the deposition phase diagram
23
Citations
10
References
2004
Year
Materials ScienceEngineeringSurface ScienceApplied PhysicsDeposition Phase DiagramSemiconductor Device FabricationChemical DepositionSilicon On InsulatorChemical KineticsChemical Vapor DepositionThin Film Processing
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