Publication | Closed Access
Processing Strategy for Producing Highly Anisotropic Silicon Nitride
254
Citations
13
References
1995
Year
Elongated GrainsEngineeringSevere Plastic DeformationPreferred OrientationMechanical EngineeringSilicon On InsulatorSiliceneMicrostructure-strength RelationshipMaterials EngineeringMaterials SciencePowder MetallurgyLarge Elongated GrainsSemiconductor Device FabricationMicrostructureSinteringMechanical PropertiesMicrofabricationApplied PhysicsAlloy CastingMechanics Of Materials
Silicon nitride with a preferred orientation of large elongated grains was obtained by tape casting of raw powder slurry seeded with rodlike β‐Si 3 N 4 particles, followed by a gas pressure sintering under 1 MPa nitrogen pressure. The large elongated grains developed from seeds lay in planes parallel to the casting direction in a two‐dimensional distribution. Increased fracture toughness (11.1 MPa·m 1/2 ) and bending strength (1100 MPa) were achieved in the direction perpendicular to the grains alignment compared to specimens with a random distribution of elongated grains. Morover, the specimens exhibited a high Weibull modulus of 46 due to the uniform distribution of large grains.
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