Monolithic Integration of CMOS VLSI and Carbon Nanotubes for Hybrid Nanotechnology Applications

Abstract

<para xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> We integrate carbon nanotube (CNT) fabrication with standard commercial CMOS very large scale integration on a single substrate suitable for emerging hybrid nanotechnology applications. This cointegration combines the inherent advantages of CMOS and CNTs. These emerging applications include CNT optical, biological, chemical, and gas sensors that require complex CMOS electronics for sensor control, calibration, and signal processing. We demonstrate the successful cointegration on a single chip with a vehicle circuit, a two-transistor cascode megahertz amplifier utilizing both silicon n-channel <emphasis emphasistype="smcaps">mosfet</emphasis> and CNT transistors with a total power consumption of 62.5 <formula formulatype="inline"><tex Notation="TeX">$\mu$</tex></formula>W. </para>