Publication | Closed Access
In situ spectroscopic ellipsometry study of TiO2 films deposited by plasma enhanced chemical vapour deposition
35
Citations
30
References
2013
Year
Materials ScienceChemical EngineeringEngineeringOxide ElectronicsSurface ScienceApplied PhysicsTio2 FilmsThin FilmsChemical DepositionChemical Vapor DepositionThin Film Processing
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