TCAD Methodology for Design of SCR Devices for Electrostatic Discharge (ESD) Applications

Abstract

Realization of on-chip electrostatic discharge (ESD) protection requires extensive technical experience and know-how. A technology computer-aided design (TCAD) methodology aimed to assist in the design and implementation of robust ESD devices is developed and presented. The methodology provides a systematic and practical means for the evaluation and optimization of ESD devices in a simulation environment. Advanced silicon-controlled-rectifier devices are considered to illustrate the approach, and experimental data measured from these devices are also included in support of the TCAD development