Modeling and Multivariable Control of a Novel Multi-Dimensional Levitated Stage with High Precision

Track seek control for hard disk dual-stage servo systems

M. Kobayashi, Roberto Horowitz · IEEE Transactions on Magnetics · 2001 · 135 citations

Engineering, Mechanical Engineering, Mechatronics Engineering +17

Magnetic field analysis of 2-D permanent magnet array for planar motor

Han-Sam Cho, Chang‐Hwan Im, Hyun‐Kyo Jung · IEEE Transactions on Magnetics · 2001 · 85 citations

Engineering, Electrical Engineering, Electric Machines +16

A little light magic [optical lithography]

F. M. Schellenberg · IEEE Spectrum · 2003 · 44 citations

Engineering, Electrical Engineering, Microfabrication +12

Motion Control of a Wafer Stage : A Design Approach for Speeding Up IC Production

D. de Roover · Research Repository (Delft University of Technology) · 1997 · 41 citations · Full text

Engineering, Manufacturing Engineering, Computer-integrated Manufacturing +9

A revisit to the gain and phase margins of linear quadratic regulators

Cishen Zhang, Minyue Fu · IEEE Transactions on Automatic Control · 1996 · 37 citations · Full text

Engineering, Systems Engineering, Dynamical Systems +16