Publication | Closed Access
Low temperature chemical vapor deposition of Co thin films from Co2(CO)8
66
Citations
26
References
2005
Year
Materials ScienceChemical EngineeringEngineeringSurface ScienceApplied PhysicsCo Thin FilmsCokingThin Film Process TechnologyThin FilmsChemical DepositionChemical Vapor DepositionThin Film Processing
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