Concepedia

Publication | Closed Access

Analysis of residual stress in cubic boron nitride thin films using micromachined cantilever beams

DOI

67

Citations

30

References

1996

Year

G. F. Cardinale, D. G. Howitt, Kevin F. McCarty, Douglas L. Medlin, Paul B. Mirkarimi, N. R. Moody
Diamond and Related Materials

References

YearCitations

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