Applied Surface Science · 2013 · 57 citations · 22 references
EngineeringMaterials EngineeringMaterials ScienceMicrofabricationSurface EngineeringSurface ScienceEtching ProcessesLaser Material ProcessingLaser Surface ProcessingMask FabricationSilicon MaterialsSurface ModificationInterference LithographyLaser Surface FunctionalizationLaser Surface ModificationLaser Surface NanostructuringLaser Surface PatterningOptical LithographySilicon
22