12.9MHz Lame-Mode Differential SOI Bulk Resonators

Abstract

In this paper, differentially driven 12.9 MHz square resonators in Lamé mode with two different types of anchor – T-anchor and straight beam anchor are presented in an attempt to investigate how the anchor design influences the quality factor, Q values. These square resonators operated in a vacuum pressure of 36μTorr exhibited Q values of 807,000 and 404,000, respectively. This difference in Q values for the two resonators is probably due to differing energy losses in their respective anchors. These resonators were fabricated using SOIMUMPs process from MEMSCAP.