Ultra-High Vacuum Valve

D. G. Bills, F. G. Allen

Review of Scientific Instruments · 1955 · 38 citations · 4 references

Concepts

Abstract

An all-metal ultra-high vacuum valve is described. The valve has a continuously variable conductance from about 1 l/sec to less than 10−14 l/sec and presumably as small as desired. An equilibrium method of measuring small leakage conductances is described.

References

4