Concepedia

Publication | Closed Access

Design and performance of an electrothermal MEMS microengine capable of bi-directional motion

DOI

13

Citations

7

References

2004

Year

Edward S. Kolesar, William E. Odom, J. Amos Robert Jayachandran, Matthew D. Ruff, Simon Y. Ko, Jeffery T. Howard, Peter B. Allen, Josh M. Wilken, Noah C. Boydston, Jorge E. Bosch,
Thin Solid Films

References

YearCitations

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