Determination of layer structure in Mo/Si multilayers using soft X-ray reflectivity

X-Ray Interactions: Photoabsorption, Scattering, Transmission, and Reflection at E = 50-30,000 eV, Z = 1-92

B. L. Henke, Eric M. Gullikson, J.C. Davis · Atomic Data and Nuclear Data Tables · 1993 · 6.2K citations

Natural Sciences, Chemistry, Physics +12

Surface Studies of Solids by Total Reflection of X-Rays

L. G. Parratt · Physical Review · 1954 · 5.1K citations

Natural Sciences, Chemistry, Materials Science +15

Characterization of surfaces by grazing X-ray reflection: Application to the study of the polishing of various silicate glasses

L. Névot, Paul Jerome Croce · 1980 · 578 citations

Natural Sciences, Materials Engineering, Materials Science +13

The scattering of x rays from nonideal multilayer structures

D. G. Stearns · Journal of Applied Physics · 1989 · 244 citations

Natural Sciences, Materials Engineering, Materials Science +17

Molybdenum-silicon multilayer mirrors for the extreme ultraviolet

Troy W. Barbee, Stanley Mrowka, Michael C. Hettrick · Applied Optics · 1985 · 216 citations

Natural Sciences, Materials Science, Physics +17