Integration Concepts for the Fabrication of LTCC Structures

Abstract

At the Keck Smart Materials Integration Laboratory at Penn State University, low‐temperature co‐fired ceramic (LTCC) material systems have been used to fabricate a number of devices for a variety of applications. This article presents an overview of the integration of the concepts and materials that we have used to achieve miniaturization and unique device function. Examples of microwave filters, metamaterial antennas, and a dielectrophoretic cell sorter will be presented, with emphasis on device modeling and design, prototype construction methods, and test results.