Journal of Materials Science · 2004 · 13 citations · 9 references
Natural SciencesMaterials EngineeringMaterials ScienceCrystal StructureElectronic MaterialsInorganic ChemistryIon ImplantationIon Beam EtchingIon Beam Irradiation
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Implanted noble gas atoms as diffusion markers in silicide formation
S.S. Lau, J. W. Mayer, Helmut Müller et al. · Thin Solid Films · 1975 · 266 citations
Natural Sciences, Materials Engineering, Materials Science +5
Epitaxial silicide formation in the Mg/Si(111) system
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Natural Sciences, Materials Engineering, Materials Science +10