On a micromachined fluidic inclinometer

Abstract

We have demonstrated the fabrication of a micromachined fluidic inclinometer for the first time. The micromachined fluidic inclinometer uses capacitance to detect the angle of inclination, and it is capable of measuring inclination with greater than 1/spl deg/ resolution. Several fluidic systems and geometries are tested to optimize speed of response and linearity. The most successful realization of the device uses amphiphilic molecules that self-assemble at the air-fluid interface to reduce surface tension, while maintaining a large dielectric constant difference. In order to increase the capacitance change due to tilt, the electrodes are interdigitated. Initial tests of the prototype devices indicated more than 1/spl deg/ of resolution with 1.38/spl deg/ repeatability, and approximately 21.9 ms response time per one degree of inclination angle change.