International Journal of Mass Spectrometry and Ion Processes · 1993 · 20 citations · 21 references
Natural SciencesChemistryPhysicsAnalytical ChemistryInorganic ChemistrySurface ScienceIonization ProcessesPlasma SourcesPlasma Surface TreatmentPlasma-surface InteractionsGlow DischargesIon-surface InteractionsMetal Ion ChemistryPlasma ChemistrySputteringSputtering ProcessesSputtering Techniques
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