Journal of Power Sources · 2001 · 152 citations · 2 references
Natural SciencesMaterials EngineeringMaterials ScienceElectrochemical EngineeringSemiconductor MaterialsThin FilmsAnode MaterialsSemiconductor Thin FilmsSilicon MaterialsThin Film Electrical PropertiesThin Film StrainThin-film MaterialsAnode DesignFilm StressSilicon AnodesSilicon Thin FilmsStress Engineering In Thin FilmsThermomechanical StressThin Film Failure Mechanisms
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