Publication | Closed Access
Characteristics of liquids atomization using surface acoustic wave
41
Citations
2
References
2002
Year
Unknown Venue
AeroacousticsEngineeringPiezoelectric SubstrateHumidity SensorAcoustic CavitationPower UltrasoundPhysical AcousticSonochemistryMaterials ScienceUltrasoundLiquids AtomizationMechanical VibrationMicrofabricationSurface ScienceApplied PhysicsTransducer PrincipleDry FogAcoustic TweezerMicromachined Ultrasonic Transducer
A novel way to produce dry fog using a surface acoustic wave transducer has been proposed. This atomizer is suitable for miniaturization and for producing a very small amount of mist to control atmospheric conditions. The device comprises a 4/spl times/8/spl times/0.6 mm/sup 3/ LiNbO/sub 3/ piezoelectric substrate. High frequency electrical power of 48 MHz is transformed into mechanical vibration using an interdigital transducer. The high frequency mechanical vibration produces a lot of small particles of liquid. The linear mean diameter of the mist was about 5 /spl mu/m. The atomizing rate was 170 /spl mu/l/min at 2.3 W input power.
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