Formation of nanocrystals with an identical orientation in sputter-deposited Ti Ni thin films

S. Kajiwara, Kazuyuki Ogawa, T. Kikuchi, T. Matsunaga, Shuichi Miyazaki

Philosophical Magazine Letters · 1996 · 40 citations · 0 references

Concepts

Abstract

During the crystallization of sputter-deposited amorphous Ti-rich Ti Ni thin films at a relatively low temperature, aggregates comprising an extremely large number of nanocrystals (102-105) are formed and, to our surprise, it is found that these nanocrystals have the exactly same orientation for an aggregate. The mechanism of formation of such nanocrystals is explored.