Concepedia

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Composition and mechanical properties of AlC, AlN and AlCN thin films obtained by r.f. magnetron sputtering

DOI

69

Citations

29

References

2009

Year

Luis Yate, J.C. Caicedo, A. Macias, F.J. Espinoza‐Beltrán, G. Zambrano, J. Muñoz‐Saldaña, P. Prieto
Surface and Coatings Technology

References

YearCitations

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