Composition and mechanical properties of AlC, AlN and AlCN thin films obtained by r.f. magnetron sputtering

Luis Yate, J.C. Caicedo, A. Macias, F.J. Espinoza‐Beltrán, G. Zambrano, J. Muñoz‐Saldaña, P. Prieto

Surface and Coatings Technology · 2009 · 72 citations · 29 references

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