Publication | Closed Access
Low temperature remote plasma sputtering of indium tin oxide for flexible display applications
48
Citations
23
References
2009
Year
Materials EngineeringMaterials ScienceEngineeringFlexible ElectronicsApplied PhysicsLow Temperature RemoteIndium Tin OxideFlexible Display ApplicationsThin FilmsGas Discharge PlasmaMicroelectronicsPlasma ProcessingThin Film Processing
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