Publication | Closed Access
Principles and Applications of Wafer Curvature Techniques for Stress Measurements in Thin Films
112
Citations
15
References
1988
Year
Materials ScienceStress MeasurementsWafer Curvature TechniquesEngineeringApplied PhysicsStressstrain AnalysisResidual StressThin Film Process TechnologyThin FilmsMechanics Of MaterialsHigh Strain Rate
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