Additively‐<scp>m</scp>anufactured piezoelectric devices

Abstract

A low‐cost micro‐stereolithography technique with the ability to additively manufacture dense piezoelectric ceramic components is reported. This technique enables the layer‐wise production of functional devices with a theoretical in‐plane resolution of ∼20 μm and an out‐of‐plane resolution of &lt;1 μm without suffering a significant reduction in the piezoelectric properties when compared to conventionally produced ceramics of the same composition. The ability to fabricate devices in complex geometries and with different material properties means that conventional limits of manufacturing are not present. A hollow, spherical shell of the piezoelectric material 0.65Pb(Mg ⅓ Nb ⅔ )O 3 –0.35PbTiO 3 , built without tooling or recourse to additional equipment or processes, is shown generating ultrasound in the MHz range.