Concepedia

Publication | Closed Access

Using a PLD BN/AlN composite as an annealing cap for ion implanted SiC

DOI

21

Citations

13

References

2002

Year

Laura B. Ruppalt, S.S. Stafford, Dongsheng Yuan, Keith Jones, Matthew H. Ervin, K. W. Kirchner, T.S. Zheleva, M. C. Wood, Bruce Geil, E. Forsythe,
Solid-State Electronics

References

YearCitations

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