A 2D Scanner by Surface and Bulk Micromachined Angular Vertical Comb Actuators

Abstract

DEVICE DESIGN We present the design, fabrication, and demonstration of a fully decoupled 2D gimbal scanner with angular vertical comb (AVC) actuators. The device is realized by combining a foundry surface-micromachining process (MUMPs) with a 3-mask deep-reactive-ionetching (DRIE) post process. Surface-micromachining provides versatile mechanical design and electrical interconnect while bulk micromachining offers flat micromirrors and high-force actuators. The scanner achieves DC mechanical scanning ranges of h6.2 (at 55 Vdc) and *4.1 (at 50 Vdc) for the inner and outer gimbals, respectively. The I-mm mirror has a radius of curvature of 40 cm.