Concepedia

Publication | Open Access

Maskless Plasmonic Lithography at 22 nm Resolution

DOIFull Paper Access

192

Citations

59

References

2011

Year

Liang Pan, Yong-Shik Park, Yi Xiong, Erick Ulin-Avila, Yuan Wang, Li Zeng, Shaomin Xiong, Junsuk Rho, Cheng Sun, David B. Bogy,
Scientific Reports

References

YearCitations

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