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Microstructure, mechanical properties, and wetting behavior of Si–C–N thin films grown by reactive magnetron sputtering

Materials ScienceSurface TechnologyEngineeringMechanical PropertiesSurface ScienceApplied PhysicsThin Film DevicesThin Film Process TechnologyThin FilmsSi–c–n Thin FilmsChemical Vapor DepositionThin Film ProcessingReactive Magnetron Sputtering