Publication | Closed Access
Sputtered thin film piezoelectric aluminum nitride as a functional MEMS material
41
Citations
31
References
2012
Year
Materials ScienceEngineeringMicrofabricationFunctional Mems MaterialApplied PhysicsNano Electro Mechanical SystemPiezoelectricityPiezoelectric MaterialThin Film Process TechnologyThin FilmsMicroelectronicsMicro-electromechanical System
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