MRS Proceedings · 1996 · 19 citations · 22 references
Natural SciencesElectrical EngineeringMaterials ScienceElectronic MaterialsMicroelectronicsThin FilmsDielectricsEtching ProcessesFerroelectric MaterialsSemiconductor Thin FilmsThin Film EtchingThin-film MaterialsDry EtchingEtchingFerroelectric CapacitorsFerroelectric Thin FilmsWet Etching
22
Fatigue-free ferroelectric capacitors with platinum electrodes
C. A-Paz de Araujo, J. D. Cuchiaro, L. D. McMillan et al. · Nature · 1995 · 2.6K citations
Natural Sciences, Materials Engineering, Materials Science +14
R. Dat, Daniel J. Lichtenwalner, Orlando Auciello et al. · Applied Physics Letters · 1994 · 181 citations
Natural Sciences, Materials Engineering, Materials Science +17