Strain in Nanoscale Germanium Hut Clusters on Si(001) Studied by X-Ray Diffraction

A.J. Steinfort, P. M. L. O. Scholte, A. R. H. F. Ettema, F. Tuinstra, M. Nielsen, E. Landemark, Detlef‐M. Smilgies, R. Feidenhans’l, Gerald Falkenberg, L. Seehofer,

Physical Review Letters · 1996 · 145 citations · 15 references

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Abstract

Scanning tunneling microscopy and synchrotron x-ray diffraction have been used to investigate nanoscale Ge hut clusters on $\mathrm{Si}(001)$. We have been able to identify the contributions to the scattered x-ray intensity which arise solely from the hut clusters and have shown that x-ray diffraction can be very sensitive to the strain field in the hut clusters. At the Ge/Si interface the Ge clusters are almost fully strained with a misfit of only 0.5% but towards the apex of the clusters the strain is relaxed and the atomic spacing is close to the natural Ge lattice spacing with a 4.2% misfit.

References

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