IEEE Transactions on Plasma Science · 1991 · 44 citations · 16 references
Natural SciencesChemistryPhysicsAnalytical ChemistryChemical KineticsPlasma PhysicsChemical Kinetics ModelingChemical Reaction KineticsIonization ProcessesKinetic ModelingMass SpectrometryReactor ModelingElectron Impact IonizationElectron-ion RecombinationGas DissociationIon RecombinationMonte Carlo Simulation ModelingParallel-plate ReactorsPlug Flow ModelReaction Rate Coefficients
Measurements were made of the RF discharge dissociation of N/sub 2/O in a parallel-plate reactor by downstream mass spectrometry using a wide range of gas flows and powers at 10 kHz and 13.56 MHz. The results show that the mass 44 signal (N/sub 2/O/sup +/), which is a measure of the amount of undissociated N/sub 2/O, is a function of the discharge input energy per N/sub 2/O molecule (eV/N/sub 2/O). A plug flow, rate equation model of the discharge was used to predict the experimental dissociation rates. A DC Monte Carlo simulation was used to calculate rate coefficients for electron-impact neutral dissociation, ionization, and dissociative ionization. The rate equation model also includes reactions among the dissociation products of N/sub 2/O and species which are synthesized in the discharge, as well as neural and electron-ion recombination at the electrodes. The model predictions identify the major reaction pathways and the sensitivities of the results to the rate coefficient values used.< <ETX xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">></ETX>
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Roger Atkinson, D. L. Baulch, R. A. Cox et al. · Journal of Physical and Chemical Reference Data · 1989 · 797 citations