A novel method for fabrication of a PLC platform for hybrid integration of an optical module by passive alignment

Concepts

EngineeringElectrical EngineeringOptical MaterialsOptoelectronicsPhotonicsIntegrated Circuit DesignIntegrated Circuit FabricationIntegrated OpticsIntegrated PhotonicsOptical FibersPhotonic Integrated CircuitsFabricationIntegrated Electro-optic DevicesOptical Fiber AlignmentOptical PackagingOptical System Alignment

Abstract

A novel fabrication method and structure of a planar lightwave circuit (PLC) platform for hybrid integration of an optical module by passive alignment technology is presented. Precise formation of V-grooves in the PLC platform can be easily obtained by the proposed process. The passive alignments of optical elements, including optical fiber, are achieved in one-mask. LD modules were implemented by the proposed method.

References

Silica-based optical waveguide on terraced silicon substrate as hybrid integration platform

Yuki Yamada, Akihiro Takagi, I. Ogawa et al. · Electronics Letters · 1993 · 100 citations

Engineering, Electrical Engineering, Materials Science +17

Application of planar lightwave circuit platformto hybrid integrated optical WDM transmitter/receiver module

Yuki Yamada, S. Suzuki, K. Moriwaki et al. · Electronics Letters · 1995 · 86 citations

Engineering, Electrical Engineering, Optical Materials +16

Micro-optical bench for alignment-free optical coupling

Yasuhiko Aoki, Toshio Kato, Rogerio Jun Mizuno et al. · Applied Optics · 1999 · 25 citations

Engineering, Electrical Engineering, Optics +16

Passive self-aligned low-cost packaging of semiconductor laser arrays on Si motherboard

Walter Hunziker, W. Vogt, H. Melchior et al. · IEEE Photonics Technology Letters · 1995 · 15 citations

Engineering, Electrical Engineering, Materials Science +17

Hybrid integrated silicon optical bench planar lightguide circuits

J.V. Gates, D.J. Muehlner, M. Cappuzzo et al. · 2002 · 13 citations

Engineering, Electrical Engineering, Optoelectronics +16