Studies of dissolution phenomena in microlithography

P. D. Krasicky, R. J. Groele, J. A. Jubinsky, Ferdinand Rodriguez, Y. M. N. Namasté, S. Kay Obendorf

Polymer Engineering and Science · 1987 · 20 citations · 2 references

Concepts

Abstract

Abstract During the dissolution process, polymer in the glassy state is, transported into a dilute solution. In some cases, a transition layer can be measured using laser interferometry. This layer is seen as a difference in reflected light intensity between the bare substrate and the maximum during dissolution. When poly(methyl methacrylate) dissolves in methyl ethyl ketone, the layer is not detectable below a polymer number‐average molecular weight of about 30,000. The layer becomes more pronounced as molecular weight of polymer increases.

References

2