Contact resistance behavior of titanium nitride

Abstract

This paper describes a highly automated contact resistance probe developed as part of our study of the contact properties of materials based on stoichiometric titanium nitride. Comparative results are shown for selected TiN samples, noble metal, and non-noble metal contacts under conditions of accelerated environmental aging and wear. Contact resistance and its temperature dependence as a function of H2O+O2 levels present during reactive sputtering are also presented.