Publication | Closed Access
The location and effects of Si in (Ti<sub>1–</sub><i><sub>x</sub></i>Si<i><sub>x</sub></i>)N<i><sub>y</sub></i> thin films
63
Citations
36
References
2009
Year
Materials EngineeringMaterials ScienceThin Film PhysicsEngineeringPhysicsNatural SciencesSurface ScienceApplied PhysicsThin Film MaterialsSemiconductor MaterialThin Film DevicesThin Film Process TechnologyThin FilmsThin Film ProcessingThin-film Technology
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