The location and effects of Si in (Ti<sub>1–</sub><i><sub>x</sub></i>Si<i><sub>x</sub></i>)N<i><sub>y</sub></i> thin films

A. Flink, Manfred Beckers, J. Sjölén, T. Larsson, Slawomir Braun, Lennart Karlsson, Lars Hultman

Journal of materials research/Pratt's guide to venture capital sources · 2009 · 66 citations · 36 references

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References

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