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The Diffusion Coefficient of Silicon in Thin SiC Layers as a Criterion for the Quality of the Grown Layers
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2000
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Materials EngineeringEngineeringNanoelectronicsDiffusion CoefficientApplied PhysicsGrown LayersSemiconductor Device FabricationSilicon On InsulatorThin Sic LayersCarbideSemiconductor Device
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