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In situ SEM observation of electromigration phenomena in fully embedded copper interconnect structures

Materials ScienceElectrical EngineeringElectromigration TechniqueEngineeringAdvanced Packaging (Semiconductors)Applied PhysicsElectromigration PhenomenaCopper Interconnect StructuresElectronic PackagingMicroelectronicsSitu Sem ObservationInterconnect (Integrated Circuits)Electrical Insulation