Publication | Closed Access
Synthesis of NiSi<sub>2</sub>by 6 MeV Ni implantation into silicon
38
Citations
16
References
1988
Year
Materials EngineeringSemiconductorsMaterials ScienceSemiconductor TechnologyEngineeringMev Ni ImplantationApplied PhysicsSemiconductor Device Fabrication
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