A new characterization method for accurate capacitor matching measurements using pseudo-floating gate test structures in submicron CMOS and BiCMOS technologies

Abstract

In deep submicron CMOS and BiCMOS technologies, antenna effects affect the floating gate charge of conventional floating gate test structures, dedicated to capacitor matching measurement. In this paper, a new pseudo-floating gate test structure is designed. After test structure and modeling presentation, the testing method and results are given for several capacitor layouts (poly-poly and metal-metal).