Tunable RF and analog circuits using on-chip MEMS passive components

Abstract

Micromachining in RF foundry processes enhances inductor and capacitor quality factors, increases varactor tuning range, and supports creation of electromechanical mixer-filters that downconvert RF signals from GHz to MHz frequency band with built-in frequency selectivity. An on-chip parallel receiver architecture and circuit blocks incorporating these MEMS devices for low-power operation are presented.