A two-axis piezoelectric tilting micromirror with a newly developed PZT-meandering actuator

Abstract

In this paper, we propose a new mechanical design of piezoelectric unimorph actuator that generate large static deflection angle by accumulating angular displacement in a cascaded piezoelectric cantilever formed in a meandering shape. The new actuator design was adopted in a double-gimbal two-dimensional optical scanner of a 4 mm x 6 mm foot print. The scanner delivered a relatively large static angle of mechanical ±8.6° at an applied voltage of 20 Vdc at a non-resonant operation.