Concepedia

Publication | Closed Access

SiCN alloys obtained by remote plasma chemical vapour deposition from novel precursors

DOI

65

Citations

33

References

2003

Year

T. P. Smirnova, L. V. Yakovkina, V. I. Bukhtiyarov, Igor Asanov, Vladimer I. Rachlin, A. N. Fomina
Thin Solid Films

References

YearCitations

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