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Kinetics and mechanism of thermal oxidation of silicon with special emphasis on impurity effects

Materials ScienceEngineeringImpurity EffectsOxidation ResistanceSpecial EmphasisApplied PhysicsIntrinsic ImpurityThermal OxidationSemiconductor Device FabricationThermodynamicsSilicon On InsulatorChemical KineticsSilicon Debugging